Polycrystalline Silicon

Low temperature Electron Cyclotron Resonance plasma technique for low loss integrated optics

Engineering / Integrated Optics / Process Integration / Pulsed Laser Deposition / Silica / Thin Film / Physical sciences / Thin Film Transistor / Silicon Oxide / Fourier transform / Room Temperature / Thermal Treatment / Electrical Properties / Interface States / Low Temperature / Polycrystalline Silicon / Electric Field / Electrical And Electronic Engineering / Thermal desorption / Defect Density / Fourier transform infrared / Thin Film / Physical sciences / Thin Film Transistor / Silicon Oxide / Fourier transform / Room Temperature / Thermal Treatment / Electrical Properties / Interface States / Low Temperature / Polycrystalline Silicon / Electric Field / Electrical And Electronic Engineering / Thermal desorption / Defect Density / Fourier transform infrared

Low-temperature wafer-level transfer bonding

Engineering Physics / Materials Engineering / Mechanical Engineering / Materials Science / Technology / Engineering Mechanics / MEMS / Collage / Microelectromechanical systems / Adhesion / Transducers / Integration / Thin Film / Si / Systems / High Temperature / High performance / Production Process / Miniaturization / Process Flow Diagram / Low Temperature / Integrated Circuit / Polycrystalline Silicon / Substrates / Electrical And Electronic Engineering / Engineering Mechanics / MEMS / Collage / Microelectromechanical systems / Adhesion / Transducers / Integration / Thin Film / Si / Systems / High Temperature / High performance / Production Process / Miniaturization / Process Flow Diagram / Low Temperature / Integrated Circuit / Polycrystalline Silicon / Substrates / Electrical And Electronic Engineering

Large-grained poly-Si films on ZnO:Al coated glass substrates

Engineering / Technology / Thin Film / Physical sciences / Grain size / Thin Solid Films / Polycrystalline Silicon / Optical Microscope / Thin Solid Films / Polycrystalline Silicon / Optical Microscope

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